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Model | VK-X200K | |
Type | Controller | |
Objective lens magnification | Magnification on a 15” monitor 100x | ? |
Magnification on a 15” monitor 200x | ||
Magnification on a 15” monitor 400x | ||
Magnification on a 15” monitor 1000x | ||
Magnification on a 15” monitor 2000x | ||
Magnification on a 15” monitor 3000x | ||
Observation/ measuring range | Horizontal (H): ?m | Magnification on a 15” monitor 100x |
Magnification on a 15” monitor 200x | ||
Magnification on a 15” monitor 400x | ||
Magnification on a 15” monitor 1000x | ||
Magnification on a 15” monitor 2000x | ||
Magnification on a 15” monitor 3000x | ||
Vertical (V): ?m | Magnification on a 15” monitor 100x | |
Magnification on a 15” monitor 200x | ||
Magnification on a 15” monitor 400x | ||
Magnification on a 15” monitor 1000x | ||
Magnification on a 15” monitor 2000x | ||
Magnification on a 15” monitor 3000x | ||
Working distance: mm | Magnification on a 15” monitor 100x | |
Magnification on a 15” monitor 200x | ||
Magnification on a 15” monitor 400x | ||
Magnification on a 15” monitor 1000x | ||
Magnification on a 15” monitor 2000x | ||
Magnification on a 15” monitor 3000x | ||
Numerical Aperture (N.A.) | Magnification on a 15” monitor 100x | |
Magnification on a 15” monitor 200x | ||
Magnification on a 15” monitor 400x | ||
Magnification on a 15” monitor 1000x | ||
Magnification on a 15” monitor 2000x | ||
Magnification on a 15” monitor 3000x | ||
Optical zoom | 1x to 8x | |
Total magnification | 200x to 24000x | |
Optical system for observation/measurement | Pinhole confocal optical system | |
Height measurement | Measuring range | 7 mm |
Z-resolution | 0.0005 µm | |
Repeatability ? | 0.012 µm*1 | |
Width measurement | Display resolution | 0.001 µm |
Repeatability 3? | 0.02 µm*2 | |
Frame memory | Pixel count | 2048 x 1536, 1024 x 768, 1024 x 64 |
For monochrome image | 16 bit | |
For colour image | 8-bit for RGB each | |
For height measurement | 24-bit | |
Frame rate | Surface scan | 4 Hz to 120 Hz |
Line scan | 7900 Hz | |
Auto function | AAG (Auto gain), Auto focus, Auto upper/lower limit setting, Double Scan brightness settings | |
Measurement laser light source for measurements | Wavelength | Violet laser, 408 nm |
Maximum output power | 0.95 mW | |
Laser Class | Class 2 Laser Product (IEC 60825-1, FDA (CDRH) Part1040.10 *3) | |
Laser light-receiving element | PMT (Photoelectron Multiplier Tube) | |
Light source for optical observation | Lamp | 100 W halogen lamp |
Colour camera for optical observation | Imaging element | 1/3' Colour CCD image sensor |
Recording resolution | Super high resolution (3072?2304) | |
Auto adjustment | Gain, Shutter speed | |
Data processing unit | Dedicated PC, supplied by KEYENCE with the VK-X (OS: Windows 7 Professional Edition) *4 | |
Rating | Power voltage | 100 to 240 VAC ±10 %, 50/60 Hz |
Power consumption | 450 VA max. | |
Weight | Approx. 11 kg | |
*1 When a standard height difference of 2 µm is measured with the 50x objective lens. *2 When the KEYENCE reference chart line width of 1 µm is measured with the 150 x objective lens in line peak mode (image averaging: 8 times). *3 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No.50. *4 Windows 7 is a registered trademark of Microsoft, U.S.A. |